Example of Wafer Plot

A manufacturer of semiconductors wants to inspect dies on semiconductor wafers from 5 different lots. They give each die a X and Y coordinate, then they inspect the number of defects on each die.

  1. Open the sample data, Semiconductor.MWX.
  2. Choose Graph > Graph Builder then select Wafer Plot from the list of graphs.
  3. In X coordinates, enter X. In Y coordinates, enter Y.
  4. In Response variable, enter Defects.
  5. In By variable , enter Lot. From Layout, select In separate panels of one graph.
  6. Select Create.

Interpret the results

The manufacturer inspects the wafer plot for areas that contain a high number of defects. Lot 5 has a large number of defects, specifically dies with very high and very low Y coordinate values. The manufacturer determines not to use these dies to produce semiconductors.